MTSE 5620 - Scanning Electron and Ion Microscopy

3 hours

Theory and applications of scanning electron microscopy and focused ion beam instrumentation. Topics include electron-solid and ion-solid interactions, electron and ion optics, image formation and analysis, X-ray microanalysis, electron backscattered diffraction analysis, focused ion beam patterning and deposition, and specimen preparation.

Prerequisite(s): Consent of instructor.

Course specific fees (in addition to tuition and mandatory):
Academic (AF) per hour: $73.67