BMEN 4320 - Biomedical Microelectromechanical Systems

3 hours (2,3)

Comprehensive introduction to the science and technology of miniaturization and its applications in biomedical engineering. Methods and tools to create submicron electromechanical and fluidic architectures, with hands-on lab practice and software modeling. Different types of lithography methods will be presented and different techniques such as chemical etching and reactive ion etching will be discussed. Applications in bio micro-electro-mechanical systems (BioMEMS) will also be discussed in different subjects, such as biosensor, microfluidics, and BioMEMS for diagnosis and tissue engineering.

Prerequisite(s): BMEN 3311, BMEN 3321.