BMEN 5324 - Applications of Biomedical MEMS

3 hours

Addresses advances in the science and technology of miniaturization and its applications in biomedical engineering. Advanced techniques to create submicron electromechanical and fluidic architectures, with hands-on lab practice and software modeling. Different types of lithography methods are presented and different techniques such as chemical etching and reactive ion etching are discussed. Applications in bio micro-electro-mechanical systems (BioMEMS) are also discussed in different subjects, such as biosensor, microfluidics, and BioMEMS for diagnosis and tissue engineering.

Prerequisite(s): BMEN 3311 and BMEN 3321, or consent of department.

Meets with BMEN 4320.